Development and manufacture of compact excimer lasers (193/248/308 nm) for medical technology, semiconductors and photonics.
MLase GmbH
Germering (headquarters, development & production)New on Amplifa
About MLase
Since December 2007, MLase GmbH has been developing and manufacturing compact excimer laser sources at 193 nm (ArF), 248 nm (KrF) and 308 nm (XeCl) at its site in Germering near Munich. The MLI series systems are characterized by pulse energies up to 16 mJ, repetition rates up to 1000 Hz, pulse stability below 2 %, and flexible air or water cooling, and are designed for integration into OEM systems and production environments. MLase offers standard configurations, OEM integration of excimer laser subsystems, and co-development of complete laser-based medical devices including system architecture, beam delivery and manufacturing. In addition, the portfolio includes peripheral components, gas supply systems and contract manufacturing of active therapeutic medical devices. As a medical device manufacturer, the company operates a quality management system certified to ISO 13485/EN ISO 13485 and has been certified under the European Medical Device Regulation (MDR) since 2025. Customers come from medical technology (LASIK, glaucoma, laser atherectomy), semiconductor and microelectronics, photonics, analytical instrumentation and micromaterial processing.
- Site
- Germering
- Processes
- UV micromachining, structuring and microdrilling (excimer lasers), Fine wire stripping via UV laser ablation (wire stripping), Precise UV laser cleaning of sensitive surfaces (contamination removal), High-resolution UV laser marking / engraving on glass and optical components, Manufacture of microfluidic systems and lab-on-a-chip components (microchannels, via drilling), Fiber Bragg Grating (FBG) writing, UV laser fabrication of optical waveguides, Laser debonding / laser lift-off (interfacial layer separation)
- Materials
- Metals, Ceramics, Glass, Semiconductors, Polyimide (PI), PTFE, ETFE, PFA
- Certificates
- EN ISO 13485, MDR certification
- Founded
- 2007-12
- Employees
- 50
- Industries
- Medical technology (laser surgery, LASIK, glaucoma treatment, laser atherectomy), Semiconductors & microelectronics, Optics, photonics & telecommunications, Analytical & scientific instruments, Micromaterial processing, Medical technology (laser surgery, refractive surgery/LASIK, glaucoma treatment,
- 01
Research & development
- 02
Design of the excimer laser sources
- 03
Assembly and manufacturing of the laser systems
- 04
Quality inspection according to ISO 13485
- 05
OEM integration or contract manufacturing of medical devices
- 06
Service and support
Wavelengths & Application Processes
Excimer laser 193 nm (ArF)
For LASIK in refractive surgery, DUV inspection, FBG writing, and photochemical microablation with minimal heat input.
Excimer laser 248 nm (KrF)
For micromaterial processing, UV marking, cleaning of sensitive surfaces, and FBG inscription.
Excimer laser 248 nm FBG variant
Specially configured variant of the MLI series for writing Fiber Bragg gratings.
Excimer laser 308 nm (XeCl)
Sealed-off laser with over 200 mJ pulse energy for laser atherectomy and glaucoma treatment.
Technical polymers (polyimide, PTFE, ETFE, PFA, polyurethane, paint,
Processed materials for selective UV ablation, fine wire stripping, and microstructuring.
Glass, quartz glass, fused silica, sapphire, diamond
Processed materials for microdrilling, UV marking, and photonic structuring.
Metals, ceramics, semiconductors, dielectric layers, CFRP
Processed materials for ablation, thin-film removal, and laser cleaning.
Locations
Germering
DEHeadquarters, development & production
- MLI-ArF series (193 nm, 200/500/1000 Hz, air/water cooling, SP/HP)
- MLI-KrF series (248 nm incl. KrFFBG variant)
- XeCl excimer laser 308 nm (>200 mJ, sealed-off)
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| UV micromachining, structuring and microdrilling (excimer lasers)Machining | – | – | – | – | Polymers, Glass, Ceramics, Metals, Semiconductors, Thin films |
| Fine wire stripping via UV laser ablation (wire stripping)Surface | – | – | – | – | Polyimide, ETFE, PTFE, PFA, Polyurethane, Paint |
| Precise UV laser cleaning of sensitive surfaces (contamination removal)Surface | – | – | – | – | Optical components, CFRP, Metal components |
| High-resolution UV laser marking / engraving on glass and optical componentsSurface | – | – | – | – | Glass, Polymers, Coated components |
| Manufacture of microfluidic systems and lab-on-a-chip components (microchannels, via drilling)Machining | – | – | – | – | Polymers |
| Fiber Bragg Grating (FBG) writingEngineering | – | – | – | – | Photosensitive quartz glass fibers (Ge-doped), Gallium-doped fibers |
| UV laser fabrication of optical waveguidesEngineering | – | – | – | – | Polymers, Glass, Fused silica |
| Laser debonding / laser lift-off (interfacial layer separation)Surface | – | – | – | – | Adhesives, Bonding polymers, Composites, Medical plastics |
| DUV photomask and reticle inspection / aerial imagingTesting | – | – | – | – | Photomasks, Reticles, Pellicles |
| Laser ablation for ICP-MS (LA-ICP-MS), TOF-MS and LIBSTesting | – | – | – | – | – |
| Medical laser applications: LASIK (193 nm), glaucoma treatment, laser atherectomy (308 nm)Engineering | – | – | – | – | Human tissue (cornea), Vascular material (fiber applicator) |
| Contract manufacturing of active therapeutic medical devicesAssembly | – | – | – | – | – |
| R&D lithography and process development; laser structuring and scribing; pulsed laser depositionEngineering | – | – | – | – | Wafers, Ceramics, Metal, Plastic |
6 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Industrial excimer laser 193 nm (ArF), 200 Hz, Standard Power, air-cooled | MLase MLI-ArF-200-SP-AC | – | Beam cross-section 6x3 mm; dimensions 560 x 315 x 445 mm; 75 kg | – | Germering |
| Industrial excimer laser 193 nm (ArF), 200 Hz, High Power, air-cooled | MLase MLI-ArF-200-HP-AC | – | Beam cross-section 6x3 mm; dimensions 560 x 315 x 445 mm; 75 kg | – | Germering |
| Industrial excimer laser 193 nm (ArF), 200/500/1000 Hz, water-cooled (SP/HP variants) | MLase MLI-ArF-*-LC | – | Beam cross-section 6x3 mm; dimensions 560 x 355 x 445 mm; 75 kg | – | Germering |
| Industrial excimer laser 193 nm (ArF), 500/1000 Hz, air-cooled (SP/HP variants) | MLase MLI-ArF-*-AC | – | Beam cross-section 6x3 mm; dimensions 560 x 315 x 445 mm; 75 kg | – | Germering |
| Industrial excimer laser 248 nm (KrF) incl. KrF-FBG variant | MLase MLI-KrF series (MLI-KrF, MLI-KrFFBG) | – | Pulse energies up to 16 mJ, repetition rates up to 1000 Hz | – | Germering |
| XeCl excimer laser 308 nm for laser atherectomy/glaucoma (>200 mJ, sealed-off) | MLase | – | – | – | Germering |
Additional services
Quality
MLase operates a quality management system certified to EN ISO 13485 (registration no. SX 2551152-1, valid until 19.11.2028) covering the development, production, distribution, servicing and contract manufacturing of active therapeutic medical devices. Since February 2025, the company has also been certified under the European Medical Device Regulation (MDR).
| Evidence | Germering |
|---|---|
| EN ISO 13485 | |
| MDR certification |
History
- 2007
Founding of MLase in Germering with a starting team of 10 employees.
- 2008
Initial certification of the quality management system according to ISO 13485.
- 2010
Production of 100 lasers within one year.
- 2015
Increase of production volume to 250 lasers per year.
- 2020
The team grows to 50 employees.
- 2023
Maxburg Capital Partners acquires a majority stake in MLase.
- 2025
Handover of management from Markus Enders and Johannes Junger to Dirk Mühlhoff; MDR certification in February.